Simple Automated Surface Roughness Measurements

Surface roughness is one of the most common measurements made with AFM. While very useful, they can become tedious and time consuming when they need to be made repeatedly on multiple samples or at multiple sites on a sample. The Oxford Instruments Jupiter Discovery AFM together with Ergo Advanced Automation software changes that by using imaging recipes that automate data acquisition. This video shows an example from start to finish where several sites across a wafer are measured. After the initial setup steps, the operator is free to step away from the AFM while the Ergo software automatically moves from site to site and measures the surface roughness at each location. The Ergo advanced automation package not only increases productivity but also ensures that the measurement is made the same way from sample to sample to improve data repeatability.