Contact resonance modulus map of patterned titanium on silicon

Contact resonance modulus data overlaid on topography for a titanium (E?~110 GPa) thin film on silicon (E?~160 GPa) imaged using contact resonance mode. Imaged on a MFP-3D Infinity, 10 µm scan. Sample courtesy of Donna Hurley, National Institute of Standards and Technology (NIST).