Part of the Oxford Instruments Group

Scanning Microwave Impedance Microscopy (sMIM)

sMIM enables nanoscale permittivity and conductivity mapping on metals, semiconductors, and insulators (compatible with all MFP-3D AFMs except Origin).

  • Provides higher lateral resolution (<50 nm) and superior signal-to-noise (>10X)
  • Operates up to 80X faster and at lower power compared to competing technologies

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