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  1. AFM Home
  2. AFM Systems and Accessories
  3. MFP-3D Accessories: Nanoelectrical Properties
  4. Scanning Microwave Impedance Microscopy (sMIM)

Scanning Microwave Impedance Microscopy (sMIM)

sMIM images of an SRAM sample (20 µm scan size, ~400 nm tall features). These images demonstrate the variety of data types that sMIM can measure.
MFP-3D AFM
Datasheet

sMIM enables nanoscale permittivity and conductivity mapping on metals, semiconductors, and insulators (compatible with all MFP-3D AFMs except Origin).

  • Provides higher lateral resolution (<50 nm) and superior signal-to-noise (>10X)
  • Operates up to 80X faster and at lower power compared to competing technologies


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