Part of the Oxford Instruments Group

Ergo Advanced Automation​

The Advanced Automation package for Jupiter XR streamlines automating measurements at different locations. It ensures that measurements are made with consistent best-known practices while also improving efficiency and usability. ​

Advanced Automation Features:​

  • Easy to use operator workflow for consistent results​
  • Includes stage automation for sites at any point on the Jupiter XR 200-mm chuck​
  • Fully customizable scan settings saved to recipe​
  • Create multiple scan profiles for different measurements in a single automation run​

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