Part of the Oxford Instruments Group

Scanning Capacitance Microscopy (SCM) Module

Scanning Capacitance Microscopy (SCM) is a nanoelectrical imaging technique available on Cypher and Jupiter XR atomic force microscopes that uses a microwave radio frequency (RF) signal to map electric charge carrier locations, dopant levels, and dopant types (p-type vs. n-type) in semiconductors and other samples. The newly designed Asylum Research SCM accessory offers significantly higher performance and capability than any other currently available SCM module. Benefits include:

  • Measures not just differential capacitance (dC/dV), but also capacitance, which is linearly correlated with dopant concentrations, enabling simpler interpretation of SCM data

  • Over 20× faster scanning improves productivity (images in as little as 10 seconds!)

  • High sensitivity enables measurements on semiconductors, energy storage devices and 2D materials

  • Higher resolution imaging reveals smaller structures

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