Nanoscale Time Dependent Dielectric Breakdown (NanoTDDB)

NanoTDDB was used to measure the breakdown voltage at each point on a 3 ?m pitch 6x6 grid on a SiO2 film.

NanoTDDB™ enables characterization of dielectric breakdown with nanoscale precision. Constant or ramped biases up to ±220 V can be applied while monitoring current through a conductive AFM probe (Available for all MFP-3D models except Origin. Voltage range on MFP-3D Infinity is ±150 V).

The spatial resolution of the AFM tip enables local measurements of dielectric breakdown (~20 nm) on much smaller length scales than possible with conventional probe stations
Precisely select measurement points from high-resolution images, or a grid of points can be mapped and analyzed

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