Part of the Oxford Instruments Group

Nanoscale Time Dependent Dielectric Breakdown (NanoTDDB)

NanoTDDB™ enables characterization of dielectric breakdown with nanoscale precision. Constant or ramped biases up to ±220 V can be applied while monitoring current through a conductive AFM probe (Available for all MFP-3D models except Origin. Voltage range on MFP-3D Infinity is ±150 V).

  • The spatial resolution of the AFM tip enables local measurements of dielectric breakdown (~20 nm) on much smaller length scales than possible with conventional probe stations
  • Precisely select measurement points from high-resolution images, or a grid of points can be mapped and analyzed

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