Part of the Oxford Instruments Group

Anodic Oxidation Lithography on Silicon

A 1 µm scan of anodic oxidation lithography on silicon, written in AC mode. This pattern was first imported as a jpeg and then written with a -10 V bias on a conductive cantilever tip at 20 nm/s. Imaged with the MFP-3D AFM.

Date: 16th November 17

Author: Asylum Research

Category: Asylum Gallery Image