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Anodic Oxidation Lithography on Silicon

A 1 ┬Ám scan of anodic oxidation lithography on silicon, written in AC mode. This pattern was first imported as a jpeg and then written with a -10 V bias on a conductive cantilever tip at 20 nm/s. Imaged with the MFP-3D AFM.

Date: 16th November 17

Author: Asylum Research

Category: Asylum Gallery Image

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