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Anodic Oxidation Nanolithography on Silicon

Author: Asylum Research

Published: 16 Nov 2017 · Last updated: 12 Jul 2018

The Creazione di Adamo (Creation of Adam) by Michelangelo was reproduced on silicon using anodic oxidation nanolithography. A TIFF image was imported into the software and used to control the tip bias voltage (-2 V to -8.3 V) during ?writing? which modulated the degree of silicon oxidation at each point. The patterned region was then scanned in AC mode to acquire the shown image. (Scan size is 20 µm). Created and imaged using the MFP-3D? AFM and MicroAngelo?.

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  • Creation_of_AdamOI.jpg

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