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Reference sample consisting of square 200 nm high titanium features patterned on silicon and imaged with Contact Resonance Viscolelastic Mapping mode using blueDrive photothermal excitation on a Cypher S AFM. Shown is the calibrated modulus data overlaid on the 3D topography (Si ~ 165 GPa, Ti ~ 110-125 GPa). Scan size is 25 µm and scan rate was 0.5 Hz. Sample courtesy of Donna Hurley, National Institute of Standards and Technology (NIST).
Date: 16th November 17
Last Updated: July 12, 2018, 11:13 am
Author: Asylum Research
Category: Asylum Gallery Image