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sMIM reveals gate failure

sMIM reveals gate failure in SRAM sample 

sMIM images of a SRAM sample. Though the topography and dR/dV channel show nothing unusual, the dC/dV phase image reveals a possible gate failure. Imaged on a Cypher, 2.5 µm scans.

Last Updated: February 20, 2019, 5:23 pm

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