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sMIM sensitivity

sMIM makes higher signal-to-noise measurements 

sMIM delivers at least 10X higher signal-to-noise compared to scanning capacitance microscopy (SCM) and scanning microwave microscopy (SMM). When used for dopant profiling, this sensitivity enables differentiation of dopant concentrations <1014 atoms/cm3. For DC capacitance measurements, sMIM has demonstrated a <0.5 aF noise floor. Even scanning 80X faster (20 Hz vs. 0.25 Hz line scan rates) and at 1000X lower source power (-15 dBm vs. 15 dBm), the signal-to-noise of sMIM images is still much better than SMM.

Category: Application Image

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