Part of the Oxford Instruments Group

PZT Capacitor Switching

0.26 µm 20/80 PZT platinum top and bottom electrodes capacitor. DC bias offset from -3.5 V to +3.5 V in 0.25 V steps using MacroBuilder. Image and histogram show evolution of ferroelectric domains through switching of 180 degrees. Built-in image stabilization fixes the XY position to within a few nm’s. 2 µm scan.

Sample courtesy of Radiant Technologies.

Category: Application Image