Part of the Oxford Instruments Group

Vacuum Sample Chuck

The Vacuum Chuck for MFP-3D AFMs allows flat samples to be held without any mechanical contacts to the top surface and with no adhesives on the bottom surface. The Vacuum Chuck has three rings to which vacuum can be routed to accommodate 3” or 4” wafers, or sample sizes between 0.8” and 3”. Note: Some regions of the wafers are not accessible.

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